Fabrication and electrical integration of robust carbon nanotube micropillars by self-directed elastocapillary densification

Vertically-aligned carbon nanotube (CNT) "forest" microstructures fabricated by chemical vapor deposition (CVD) using patterned catalyst films typically have a low CNT density per unit area. As a result, CNT forests have poor bulk properties and are too fragile for integration with microfabrication processing. We introduce a new self-directed capillary densification method where a liquid is controllably condensed onto and evaporated from CNT forests. Compared to prior approaches, where the substrate with CNTs is immersed in a liquid, our condensation approach gives significantly more uniform structures and enables precise control of the CNT packing density and pillar cross-sectional shape. We present a set of design rules and parametric studies of CNT micropillar densification by this method, and show that self-directed capillary densification enhances the Young's modulus and electrical conductivity of CNT micropillars by more than three orders of magnitude. Owing to the outstanding properties of CNTs, this scalable process will be useful for the integration of CNTs as functional material in microfabricated devices for mechanical, electrical, thermal, and biomedical applications

Multiplexed, High Density Electrophysiology with Nanofabricated Neural Probes

Extracellular electrode arrays can reveal the neuronal network correlates of behavior with single-cell, single-spike, and sub-millisecond resolution. However, implantable electrodes are inherently invasive, and efforts to scale up the number and density of recording sites must compromise on device size in order to connect the electrodes. Here, we report on silicon-based neural probes employing nanofabricated, high-density electrical leads. Furthermore, we address the challenge of reading out multichannel data with an application-specific integrated circuit (ASIC) performing signal amplification, band-pass filtering, and multiplexing functions. We demonstrate high spatial resolution extracellular measurements with a fully integrated, low noise 64-channel system weighing just 330 mg. The on-chip multiplexers make possible recordings with substantially fewer external wires than the number of input channels. By combining nanofabricated probes with ASICs we have implemented a system for performing large-scale, high-density electrophysiology in small, freely behaving animals that is both minimally invasive and highly scalable

Technology of ultralong deep brain fluidic microelectrodes combined with etching-before-grinding

This paper presents a combined fabrication technique that is based on some recent advances in silicon microengineering. Buried microchannels in ultralong silicon microelectrodes thinned by etching-before grinding technology offers novel functional microdevices in the field of neural interfaces. Providing injection, sampling and electrical recording-all integrated monolithically in a long and subsequently thinned silicon microelectrode-extends translational research in fundamental neuroscience due to reduced microelectrode dimensions and functionality like stimulation and recording in deep brain region of cats or apes. © 2013 Springer-Verlag Berlin Heidelberg

Microprobe array with low impedance electrodes and highly flexible polyimide cables for acute neural recording

This paper reports on a novel type of silicon-based microprobes with linear, two and three dimensional (3D) distribution of their recording sites. The microprobes comprise either single shafts, combs with multiple shafts or 3D arrays combining two combs with 9, 36 or 72 recording sites, respectively. The electrical interconnection of the probes is achieved through highly flexible polyimide ribbon cables attached using the MicroFlex Technology which allows a connection part of small lateral dimensions. For an improved handling, probes can be secured by a protecting canula. Low-impedance electrodes are achieved by the deposition of platinum black. First in vivo experiments proved the capability to record single action potentials in the motor cortex from electrodes close to the tip as well as body electrodes along the shaft